Power Device Measurement System

Name
Power Device Measurement System
Number
HF-012
Location
Hsinchu
Class
Nano and Power Devices Measurement
Access Level
B4
Contact
Mr. Chen   03-5773693 #7570
E-mail
bychen@narlabs.org.tw
Booking Method
Self-booking   Assisted Booking    User Self-service
Last Update
2025.01.09
【DC-pulsed Electrical Test】
【AC-dynamic Electrical Test】
【Device Thermal Analysis】
 
 

Introduction

HF-012 Measurement of DC IV, CV, and pulsed-IV up to 10 kV and 500 A (pulsed) of power device datasheet. The switch characteristics are only for 3 package types. Microsanj thermal analysis systems are provided with nanoscale-level thermal analysis capability.

This system offers three types of tests for high-power components: 【DC-pulsed Electrical Test】, 【AC-dynamic Electrical Test】, and 【Device Thermal Analysis】.
The details are as follows:

【Device-pulsed Electrical Test】The main measurement instrument used is the Keysight B1505A Power Device Analyzer, which includes the following modules: B1511A (MPSMU), B1512A (HCSMU), B1513A (HVSMU), B1514A (MCSMU), and B1520A (MFCMU). It is operated using the built-in Keysight EasyEXPERT software to measure electrical parameters of power devices such as current-voltage characteristics, capacitance-voltage characteristics, and breakdown voltage.
This system utilizes the Cascade Microtech TESLA semi-automatic probing station equipped with a temperature control system. It can be configured with software for wafer-level automatic testing and also includes Keysight 1259A and Keysight 1265A Test Fixtures for package-level device testing.

  1. B1511A (MPSMU)：
    ±20 V Iout≦±100 mA ；±40 V Iout≦±50 mA ；±100 V Iout≦±20 mA
  2. B1512A (HCSMU)：
    ±40 V Iout≦±1000 mA ；±20 V Iout≦±20 A (pulsed mode)
  3. B1513A (HVSMU)：
    ±1500 V Iout≦±8 mA ；±3000 V Iout≦±4 mA
  4. B1514A (MCSMU)：
    ±30V Iout≦±100 mA；±30 V Iout≦±1A (pulsed mode)
  5. B1520A (MFCMU)：
    Frequency：1kHz ~ 5MHz
  6. Range of temperature control system：
    +25℃ ~ +200℃
  7. N1265A (UHC)：
    60 V/500 A (PW: 10us-1ms)
  8. N1266A (HVMCU)：
    1500 V/2.5 A、2200 V/1.1 A (PW: 10us-100us)； 2200 V/110 mA (PW: 10us-1ms)
  9. N1272A (Device Capacitance Selector)：
    Frequency：1kHz ~ 1MHz Voltage：+3000V (Ciss, Coss, Crss, Rg)
  10. N1274A (Gate Charge Measurement, Qg)：
    Voltage：+3000 V； Current：+20 A (On Wafer)；Current：+500 A (Package)
  11. N1267A (HVSMU/HCSMU Fast Switch)
  12. N1268A (Ultra High Voltage)
    ±10000 V Iout≦±10 mA；±10000 V Iout≦±20 mA (pulsed mode)

【AC-dynamic Electrical Test】The measurement instrument used is an integrated measurement system comprising a high-power power supply and a high-power high-speed oscilloscope. It is primarily used for testing packaged components and is combined with the STAr Taurus-PDAT III. This setup enables the measurement of the AC dynamic characteristics of power components, including Gate Charge (QG), Resistive Switching, Diode Reverse Recovery, Short-Circuit, and other electrical parameters.
  1. Testable package types：TO-220，TO-247，PQFN(8x8)
  2. Input Voltage：≦ ±30 V； Input Current：≦ 10 A
    Output Current：≦ 500 A； Output Voltage：10 V~ 1500 V
  3. Short-Circuit Test
    Output Current：≦ 2000 A；Output Voltage：10 V~ 1500 V

【Device Thermal Analysis】The measurement instrument used is the Microsanj thermal analysis system, which can capture thermal images and thermal distribution under component operating conditions.
  1. Output Voltage：≦ ±10 V； Output Current：≦ 1 A
  2. Multiple sensors available for TR and IR imaging
  3. Spectral Range: 400 nm to 800 nm for TR Mode, 7.5 microns to 13.5 microns for IR Mode
  4. Active Thermal Pixels: 1920 x 1200 for TR Mode, 640 x 512 for IR Mode
  5. Transient Resolution: 50 microseconds

Service

  1. Voltage Range: ±10000 V, Current Range: 500A (pulsed mode maximum)
  2. DUT: Power-MOSFET, IGBT, GaN, SiC, Power-Diode etc.
  3. Measurement item: (V(BR)DSS) Drain-Source Breakdown Voltage, (VGS(th)) Gate Threshold Voltage, (IDSS) Zero Gate Voltage Drain Current, (IGSS) Gate-Source Leakage Current, (RDS(on)) Drain-Source On-State Resistance, (gfs) Transconductance, (Ciss) Input Capacitance, (Coss) Output Capacitance, (Crss) Reverse Transfer Capacitance, (RG) Internal Gate Resistance, (Qg) Total Gate Charge, (Qgs) Gate to Source Charge, (Qgd) Gate to Drain Charge, (VSD) Diode Forward Voltage, (IS) Continuous Diode Forward Current, (t(d)on) Turn-On Delay Time, (tr) Rise Time, (t(d)off) Turn-Off Delay Time, (tf) Fall Time, (trr) Reverse Recovery Time, (Qrr) Reverse Recovery Charge.
 

Equipment

【DC-pulsed Electrical Test】
  1. Keysight B1505A Power Device Analyzer
  2. Cascade Microtech TESLA Semi-Auto/Manual probe-station
  3. Keysight 1259A，Keysight N1265A Text Fixture
【AC-dynamic Electrical Test】
  1. STAr Taurus-PDAT III
  2. Magnapower XR1500 Power Supply
  3. Teledyne LeCroy HDO 6104A High-Definition Oscilloscope
【Device Thermal Analysis】
  1. Microsanj EZ500 Thermal Imaging System
 

Software

【DC-pulsed Electrical Test】
  1. Keysight EasyEXPERT
  2. STAr Sagittarius
【AC-dynamic Electrical Test】
  1. STAr Taurus
【Device Thermal Analysis】
  1. SanjANALYZER

Supplementary Information

Price List
Q&A
 

Notice

Users without attending their session will still get charged according to the Price List.
【Self-booking】 Users should attend their reserved session. If cancellation is necessary, please complete it on the official website at least 3 days before.
【Assisted Booking】 Users should arrive as scheduled. If a reschedule is required, please inform the assigned engineer in advance.
【User Self-service】 Please use the system within the reserved session after reservation.

Instrument Reservation Procedure

Users can initiate the reservation process by visiting the TSRI homepage.
Navigate to 'Measurement Services' and select the desired reservation item.
Log in to the reservation system to proceed with the reservation.
 
 
  1. 【Self-booking】Please make a reservation on the available pages.
  2. 【Assisted Booking】After applying and receiving approval from TSRI engineers, the Booking System will send notifications containing the data and time of appointments.
  3. Users are required to arrive at the laboratory on time. Absent users will be charged a minimum of one unit of time usage fee.
  4. Upon the completion of measurement appointments, users will receive completion notifications via email. If no objections are raised within the specified timeframe, please complete payment by the expiry date. If emails are not received, please contact TSRI customer service.
  5. All instruments or accessories must be returned to their original locations to keep the order and convenience for the next users.
  6. In the event of any damaged, missing, dysfunctional, or non-operational instruments or accessories, please promptly notify the engineers.
  7. Users are not permitted to use laboratory computers or remotely access their personal computers. If computer access is necessary, please contact the laboratory assistant or engineers.
  8. The laboratory operates during the hours of 9:00 AM to 12:00 PM and 1:00 PM to 5:00 PM. During the lunch break, the laboratory is closed, and the users are advised to wait in the hallway.
  9. Food and beverages are strictly prohibited within the laboratory.
  10. TSRI reserves all the rights to approve the usage of all laboratory equipment and resources.