MEMS System
Name
MEMS Measurement System
Number
HF-M01
Location
Hsinchu
Class
MEMS measurement
Access Level
B4
Contact
Mr. Chang 03-5773693 #7202
Mr. Wang 03-5773693 #7247
Mr. Wang 03-5773693 #7247
E-mail
1913004@narlabs.org.tw / nick.wang@narlabs.org.tw
Booking method
Self-booking Assisted Booking User Self-service
Polytec White Light Inteferometer (Topography Measurement and In plane Vibration Analyzer)
Laser Doppler Vibrometer (Out-of-plane resonant frequency)