4K Cryogenic Probe Station

儀器名稱
超低溫電性量測平台
儀器名稱英文
Cryogenic On-Chip Measurement System
編號
HF-016
地區
新竹
機台類別
低溫量測
開放等級
B4
聯絡窗口
陳先生   03-5773693#7570
聯絡信箱
bychen@narlabs.org.tw
開放預約方式
預約制   排單制   自行操作
 
 

Introduction

This cryogenic probe station is a six-probe system which is capable of reaching low temperature of 4K using liquid nitrogen cryogen. The system provides precisely controlled environments of the electrical properties, including 4-point probe IV characterization and 2-port S-parameters up to 50 GHz.

Service

  1. Temperature Range：4K ~ 300K (-269℃ ~ 27℃)
  2. Voltage Range：±100 V, Current Range：±100 mA
  3. 2-port S-parameter measurement：100 MHz ~ 50 GHz
  4. DUT: MOSFET, BJT, HEMT, HBT, Resistance, Capacitor, Inductor etc.

Hardware

  1. Lake Shore CRX-4K Cryogenic Probe Station
  2. Keysight N5247B Network Analyzer
  3. Keysight B1500A Semiconductor Device Analyzer, (B1517*3, B1510*1, B1520*1)
  4. Bias Tee：Anritsu SC7287 100 MHz ~ 65 GHz, Max. Voltage 50 V, Max. Current 500 mA. 

Software

  1. Keysight EasyEXPERT
  2. Keysight PathWave IC-CAP

Supplementary Information

本系統由室溫降溫至低溫(300K to 4K)時間約為2.5~3小時,為有效利用量測時段,建議於測試前一工作天將試片交付工程師,放置試片於腔體必要時調整架設以便於測試當日降至量測溫度。
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注意事項

無故未到仍將依本中心計費標準收費
【預約制】預約完成後請依各儀器預約時間至本中心，如須取消請於3天前在網頁上取消
【排單制】依約至本中心，如須改期等請提前與負責工程師聯絡
【自行操作】預約後請依時使用

Instrument Reservation Procedure

Users can initiate the reservation process by visiting the TSRI homepage.
Navigate to 'Measurement Services' and select the desired reservation item.
Log in to the reservation system to proceed with the reservation.
 
 
  1. 【Self-booking】Please make a reservation on the available pages.
  2. 【Assisted Booking】After applying and receiving approval from TSRI engineers, the Booking System will send notifications containing the data and time of appointments.
  3. Users are required to arrive at the laboratory on time. Absent users will be charged a minimum of one unit of time usage fee.
  4. Upon the completion of measurement appointments, users will receive completion notifications via email. If no objections are raised within the specified timeframe, please complete payment by the expiry date. If emails are not received, please contact TSRI customer service.
  5. All instruments or accessories must be returned to their original locations to keep the order and convenience for the next users.
  6. In the event of any damaged, missing, dysfunctional, or non-operational instruments or accessories, please promptly notify the engineers.
  7. Users are not permitted to use laboratory computers or remotely access their personal computers. If computer access is necessary, please contact the laboratory assistant or engineers.
  8. The laboratory operates during the hours of 9:00 AM to 12:00 PM and 1:00 PM to 5:00 PM. During the lunch break, the laboratory is closed, and the users are advised to wait in the hallway.
  9. Food and beverages are strictly prohibited within the laboratory.
  10. TSRI reserves all the rights to approve the usage of all laboratory equipment and resources.